PREFIX emg: <https://purls.helmholtz-metadaten.de/emg/>
PREFIX rdf: <http://www.w3.org/1999/02/22-rdf-syntax-ns#>
PREFIX rdfs: <http://www.w3.org/2000/01/rdf-schema#>
PREFIX xsd: <http://www.w3.org/2001/XMLSchema#>

emg:EMG_00000007 a rdfs:Class ;
  rdfs:label "Beam Path" ;
  rdfs:comment "Path which the beam flows along defined by the optical components of the instrument." .

emg:EMG_00000053 a rdfs:Class ;
  rdfs:label "Transmission Kikuchi Diffraction" ;
  rdfs:comment "Kikuchi diffraction during which electrons leave the electron-transparent sample at the side opposite to the incident beam." ;
  rdfs:subClassOf emg:EMG_00000051 .

emg:EMG_00000002 a rdfs:Class ;
  rdfs:label "TEM Backscattering" ;
  rdfs:comment "Scattering which results in scattered electrons with an absolute scattering angle larger than 90 degrees." ;
  rdfs:subClassOf emg:EMG_00000043 .

emg:EMG_00000069 a rdfs:Class ;
  rdfs:label "Photon Detector" ;
  rdfs:comment "A detector which is used for registering photons." ;
  rdfs:subClassOf emg:EMG_00000066 .

emg:EMG_00000026 a rdfs:Class ;
  rdfs:label "Extraction Voltage" ;
  rdfs:comment "Voltage which is utilised to create an electric field that draws particles from the source." .

emg:EMG_00000049 a rdfs:Class ;
  rdfs:label "Wait Time" ;
  rdfs:comment "Time period in which no data are acquired." ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000015 a rdfs:Class ;
  rdfs:label "Dwell Time" ;
  rdfs:comment "Time period during which the beam remains at one position." ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000035 a rdfs:Class ;
  rdfs:label "Incident Beam" ;
  rdfs:comment "Primary beam before it interacts with the specimen." ;
  rdfs:seeAlso <https://www.iso.org/obp/ui/#iso:std:iso:23833:ed-2:v1:en> , <https://www.iso.org/obp/ui/#iso:std:iso:15932:ed-1:v1:en> ;
  rdfs:subClassOf emg:EMG_00000040 .

emg:EMG_00000050 a rdfs:Class ;
  rdfs:label "Working Distance" ;
  rdfs:comment "Distance which is determined along the optical axis within the column from (1) the lower end of the final optical element between the source and the specimen stage; to (2) the point where the beam is focused." .

emg:EMG_00000038 a rdfs:Class ;
  rdfs:label "Monochromatic Beam" ;
  rdfs:comment "A beam which consists of particles of the same energy." ;
  rdfs:subClassOf emg:EMG_00000005 .

emg:EMG_00000068 a rdfs:Class ;
  rdfs:label "Ion Detector" ;
  rdfs:comment "A detector which is used for registering ions." ;
  rdfs:subClassOf emg:EMG_00000066 .

emg:EMG_00000072 a rdfs:Class ;
  rdfs:label "Dose" ;
  rdfs:comment """A quantity which quantifies the number of particles transitioning through a defined area.
""" .

emg:EMG_00000019 a rdfs:Class ;
  rdfs:label "Electron Backscatter Diffraction" ;
  rdfs:comment "Electron diffraction which primarily involves backscattered electrons from a solid sample." ;
  rdfs:subClassOf emg:EMG_00000022 .

emg:EMG_00000057 a rdfs:Class ;
  rdfs:label "Detector Moving Time" ;
  rdfs:comment """Moving time during which either the position or the  orientation of a detector is altered.
""" ;
  rdfs:subClassOf emg:EMG_00000058 .

emg:EMG_00000008 a rdfs:Class ;
  rdfs:label "Camera Length" ;
  rdfs:comment "Distance which is present between the specimen surface and the detector plane." ;
  rdfs:seeAlso <https://doi.org/10.1016/j.ultramic.2020.112956> , <https://doi.org/10.1017/S1431927619002988> .

emg:EMG_00000061 a rdfs:Class ;
  rdfs:label "Point Source" ;
  rdfs:comment "Spatial volume which has negligible extent, and from where particles or radiation originate and are emitted in all directions." ;
  rdfs:seeAlso <https://en.wikipedia.org/wiki/Point_source#:~:text=A%20point%20source%20is%20a,mathematical%20point%20to%20simplify%20analysis.> .

emg:EMG_00000010 a rdfs:Class ;
  rdfs:label "Convergence Angle" ;
  rdfs:comment "The angle which is given by the semi-opening angle of the cone in a convergent beam." .

emg:EMG_00000076 a rdfs:Class ;
  rdfs:label "Specimen Chamber" ;
  rdfs:comment "A physical part of an electron or ion microscope which encloses a volume intended to include the specimen." .

emg:EMG_00000065 a rdfs:Class ;
  rdfs:label "Bragg's Law" ;
  rdfs:comment "A condition which (1) is defined as twice the lattice spacing in a large crystal multiplied with the sine of the Bragg angle between the incident beam and a set of lattice planes, being a whole multiple of the radiation wavelength, and (2) if satisfied, may allow to relate the location of a scattering intensity maximum within a diffraction pattern to the corresponding lattice plane spacing." ;
  rdfs:seeAlso <https://physicsopenlab.org/2018/01/18/bragg-diffraction/> .

emg:EMG_00000004 a rdfs:Class ;
  rdfs:label "Acceleration Voltage" ;
  rdfs:comment "The potential difference between anode and cathode." .

emg:EMG_00000045 a rdfs:Class ;
  rdfs:label "Source" ;
  rdfs:comment "A physical part of the gun from which the particles that form the beam are emitted." .

emg:EMG_00000043 a rdfs:Class ;
  rdfs:label "Scattering" ;
  rdfs:comment "A physical phenomenon during which the trajectory of a particle is changed due to interaction with matter." .

emg:EMG_00000079 a rdfs:Class ;
  rdfs:label "Column Pressure" ;
  rdfs:comment """The pressure which is measured by a sensor within the column. 
""" .

emg:EMG_00000054 a rdfs:Class ;
  rdfs:label "Dead Time" ;
  rdfs:comment "Wait time which is due to a particle detector being physically incapable of registering detector events." ;
  rdfs:subClassOf emg:EMG_00000049 .

emg:EMG_00000034 a rdfs:Class ;
  rdfs:label "Frame Time" ;
  rdfs:comment "Time period during which a frame is fully scanned." ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000029 a rdfs:Class ;
  rdfs:label "Focal Length" ;
  rdfs:comment "Distance which lies between the principal plane of the lens and the focal point along the optical axis." .

emg:EMG_00000014 a rdfs:Class ;
  rdfs:label "Disk Of Least Confusion" ;
  rdfs:comment "A cross section of a beam at which the beam has the smallest spatial extent." .

emg:EMG_00000003 a rdfs:Class ;
  rdfs:label "TEM Forwardscattering" ;
  rdfs:comment "Scattering which results in scattered electrons with an absolute scattering angle smaller than 90 degrees." ;
  rdfs:subClassOf emg:EMG_00000043 .

emg:EMG_00000030 a rdfs:Class ;
  rdfs:label "Focal Plane" ;
  rdfs:comment "Plane which is perpendicular to the optical axis and includes the focal point." .

emg:EMG_00000025 a rdfs:Class ;
  rdfs:label "Emission Current" ;
  rdfs:comment "Electrical current which is released from the source." .

emg:EMG_00000039 a rdfs:Class ;
  rdfs:label "Pole Piece" ;
  rdfs:comment "A physical part of an electron or ion microscope which is part of the electromagnetic lens and is used to amplify and shape the magnetic field used to manipulate the beam." .

emg:EMG_00000082 a rdfs:Class ;
  rdfs:label "Sample Environment Pressure" ;
  rdfs:comment """The pressure which a specimen is exposed to locally.
""" .

emg:EMG_00000075 a rdfs:Class ;
  rdfs:label "Detector Pixel Size" ;
  rdfs:comment """Area which is covered by one detector pixel.
""" .

emg:EMG_00000064 a rdfs:Class ;
  rdfs:label "Bragg Diffraction" ;
  rdfs:comment "Diffraction which follows Bragg's law." ;
  rdfs:subClassOf emg:EMG_00000022 .

emg:EMG_00000018 a rdfs:Class ;
  rdfs:label "Elastic Scattering" ;
  rdfs:comment "Scattering during which the particle that is scattered does not change its energy." ;
  rdfs:subClassOf emg:EMG_00000043 .

emg:EMG_00000060 a rdfs:Class ;
  rdfs:label "Frame" ;
  rdfs:comment "An array of data which represents a coherent and discrete set of time." .

emg:EMG_00000071 a rdfs:Class ;
  rdfs:label "Pixel" ;
  rdfs:comment """Data which is the smallest element of a digital image or data array.
""" .

emg:EMG_00000046 a rdfs:Class ;
  rdfs:label "Specimen" ;
  rdfs:comment "A physical entity which contains material intended to be investigated." .

emg:EMG_00000042 a rdfs:Class ;
  rdfs:label "Region Of Interest" ;
  rdfs:comment "Area which is (1) on the specimen and (2) to be sampled during an experiment." .

emg:EMG_00000028 a rdfs:Class ;
  rdfs:label "Flyback Time" ;
  rdfs:comment "Time period during which the beam moves from the final position of one scan line to the starting position of the subsequent scan line." ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000013 a rdfs:Class ;
  rdfs:label "Diffraction Pattern" ;
  rdfs:comment "A pattern which consists of spatial intensity modulation generated by diffraction." .

<http://purl.org/dc/terms/LicenseDocument> a rdfs:Class .

emg:EMG_00000059 a rdfs:Class ;
  rdfs:label "Sample Moving Time" ;
  rdfs:comment """Moving time during which either the position or the orientation  of the sample is altered.
""" ;
  rdfs:subClassOf emg:EMG_00000058 .

emg:EMG_00000033 a rdfs:Class ;
  rdfs:label "Frame Flyback Time" ;
  rdfs:comment "Time period during which the beam moves from the final position of one frame to the starting position of the subsequent frame." ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000081 a rdfs:Class ;
  rdfs:label "Gun Pressure" ;
  rdfs:comment """The pressure which is measured by a sensor within the gun.
""" .

emg:EMG_00000006 a rdfs:Class ;
  rdfs:label "Beam Current" ;
  rdfs:comment "Electrical current which flows along the beam path." .

emg:EMG_00000024 a rdfs:Class ;
  rdfs:label "Electron Probe" ;
  rdfs:comment "The part of the beam which interacts with the sample." .

emg:EMG_00000020 a rdfs:Class ;
  rdfs:label "Electron Backscatter Diffraction Pattern" ;
  rdfs:comment "A diffraction pattern which is generated by electron backscatter diffraction." ;
  rdfs:subClassOf emg:EMG_00000013 .

emg:EMG_00000063 a rdfs:Class ;
  rdfs:label "Kikuchi Band" ;
  rdfs:comment """Pattern of electron intensity which is (1) formed by electron diffraction, (2) appears  as a geometrical feature in a Kikuchi pattern, (3) is an area different in intensity  compared to background, and (4) is limited on each side by a Kikuchi line.
""" .

emg:EMG_00000080 a rdfs:Class ;
  rdfs:label "Gun" ;
  rdfs:comment """A physical part of an electron or ion microscope which contains a source and an accelerating structure to produce a beam. 
""" .

emg:EMG_00000036 a rdfs:Class ;
  rdfs:label "Inelastic Scattering" ;
  rdfs:comment "Scattering during which the particle that is scattered changes its energy." ;
  rdfs:subClassOf emg:EMG_00000043 .

emg:EMG_00000052 a rdfs:Class ;
  rdfs:label "Kikuchi Pattern" ;
  rdfs:comment "A diffraction pattern which is generated by Kikuchi diffraction." ;
  rdfs:subClassOf emg:EMG_00000013 .

emg:EMG_00000047 a rdfs:Class ;
  rdfs:label "Tilt Correction" ;
  rdfs:comment "An imaging setting which can be used during acquisition to correct perspective distortion when imaging a tilted surface or cross section." .

emg:EMG_00000074 a rdfs:Class ;
  rdfs:label "Pixel Size" ;
  rdfs:comment """Measure which corresponds to the dimensions represented by one pixel.
""" .

<http://purl.org/dc/terms/Agent> a rdfs:Class .

emg:EMG_00000041 a rdfs:Class ;
  rdfs:label "Probe Current" ;
  rdfs:comment "Electrical current which arrives at the specimen." .

emg:EMG_00000058 a rdfs:Class ;
  rdfs:label "Moving Time" ;
  rdfs:comment """Time period during which the position or orientation of either the beam  or physical components are changed within a coordinate system of the  microscope. 
""" ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000017 a rdfs:Class ;
  rdfs:label "Dynamic Refocusing" ;
  rdfs:comment "A workflow to keep the specimen in focus by automatic means." .

emg:EMG_00000009 a rdfs:Class ;
  rdfs:label "Coherent Beam" ;
  rdfs:comment "A monochromatic beam which consists of waves that have a defined phase relationship." ;
  rdfs:subClassOf emg:EMG_00000038 .

emg:EMG_00000070 a rdfs:Class ;
  rdfs:label "Detector Pixel" ;
  rdfs:comment """A detector which is non-divisable and of finite size.
""" ;
  rdfs:subClassOf emg:EMG_00000066 .

emg:EMG_00000023 a rdfs:Class ;
  rdfs:label "Electron Diffraction Pattern" ;
  rdfs:comment "A diffraction pattern which is generated from electron diffraction." ;
  rdfs:subClassOf emg:EMG_00000013 .

emg:EMG_00000040 a rdfs:Class ;
  rdfs:label "Primary Beam" ;
  rdfs:comment "A beam which is unaltered in terms of its direction after interaction with the specimen." ;
  rdfs:subClassOf emg:EMG_00000005 .

emg:EMG_00000051 a rdfs:Class ;
  rdfs:label "Kikuchi Diffraction" ;
  rdfs:comment "Electron diffraction during which, in a sequential order, electrons of the incident beam are inelastically scattered, form a point source inside the specimen, and leave the specimen through Bragg diffraction." ;
  rdfs:subClassOf emg:EMG_00000022 .

emg:EMG_00000021 a rdfs:Class ;
  rdfs:label "Electron Beam" ;
  rdfs:comment "A beam which consists of electrons." ;
  rdfs:subClassOf emg:EMG_00000005 .

emg:EMG_00000001 a rdfs:Class ;
  rdfs:label "SEM Backscattering" ;
  rdfs:comment "Scattering during which electrons of an incident beam are scattered by a specimen, such that some of the scattered particles leave the specimen via the incident surface again." ;
  rdfs:subClassOf emg:EMG_00000043 .

emg:EMG_00000012 a rdfs:Class ;
  rdfs:label "Diffraction" ;
  rdfs:comment "A physical phenomenon during which the direction and intensity of a propagating wave is changed due to interaction with matter having structure dimensions in the order of the wavelength." .

emg:EMG_00000032 a rdfs:Class ;
  rdfs:label "Focused Beam" ;
  rdfs:comment "A convergent beam which originates from a coherent beam and whose cross section is decreased to the physically smallest possible disc of least confusion." ;
  rdfs:subClassOf emg:EMG_00000011 .

emg:EMG_00000056 a rdfs:Class ;
  rdfs:label "Beam Moving Time" ;
  rdfs:comment """Moving time during which either the position or the tilt of the beam is altered.
""" ;
  rdfs:subClassOf emg:EMG_00000058 .

emg:EMG_00000005 a rdfs:Class ;
  rdfs:label "Beam" ;
  rdfs:comment "A group of particles which move, on average, in a common direction." .

emg:EMG_00000073 a rdfs:Class ;
  rdfs:label "Electron Dose" ;
  rdfs:comment """A dose which accounts for electrons.
""" ;
  rdfs:subClassOf emg:EMG_00000072 .

emg:EMG_00000067 a rdfs:Class ;
  rdfs:label "Electron Detector" ;
  rdfs:comment "A detector which is used for registering electrons." ;
  rdfs:subClassOf emg:EMG_00000066 .

emg:EMG_00000011 a rdfs:Class ;
  rdfs:label "Convergent Beam" ;
  rdfs:comment "A beam which is conically shaped such that its cross section is decreased to form a disc of least confusion." ;
  rdfs:subClassOf emg:EMG_00000005 .

emg:EMG_00000048 a rdfs:Class ;
  rdfs:label "Time Period" ;
  rdfs:comment "An interval of time." .

emg:EMG_00000037 a rdfs:Class ;
  rdfs:label "Ion Beam" ;
  rdfs:comment "A beam which consists of ions." ;
  rdfs:subClassOf emg:EMG_00000005 .

emg:EMG_00000077 a rdfs:Class ;
  rdfs:label "Specimen Chamber Pressure" ;
  rdfs:comment """The pressure which is measured by a sensor for the volume within the specimen chamber.
""" .

emg:EMG_00000031 a rdfs:Class ;
  rdfs:label "Focal Point" ;
  rdfs:comment "Point which is defined by the intersection of the optical axis and the backwards extrapolated path of a ray that (1) is tending towards infinity, (2) was parallel to the optical axis in the incident beam, and (3) that was deflected by an electron lens." .

emg:EMG_00000078 a rdfs:Class ;
  rdfs:label "Column" ;
  rdfs:comment """A physical part of an electron or ion microscope which holds the optical components of the device.
""" .

emg:EMG_00000062 a rdfs:Class ;
  rdfs:label "Kikuchi Lines" ;
  rdfs:comment """Patterns of electron intensity which are (1) formed by electron diffraction, (2) appear as a geometrical  feature in a Kikuchi pattern as a pair of lines limiting Kikuchi bands.
""" .

emg:EMG_00000044 a rdfs:Class ;
  rdfs:label "Scattering Angle" ;
  rdfs:comment "The angle which spans between the tangent of the incoming trajectory of an particle and the the tangent of the outgoing trajectory of the same particle, prior and past an instance of scattering." .

emg:EMG_00000055 a rdfs:Class ;
  rdfs:label "Acquisition Time" ;
  rdfs:comment "time period during which data is acquired." ;
  rdfs:subClassOf emg:EMG_00000048 .

emg:EMG_00000027 a rdfs:Class ;
  rdfs:label "Filament Current" ;
  rdfs:comment "Electrical current which flows through the source." .

emg:EMG_00000016 a rdfs:Class ;
  rdfs:label "Dynamic Focus Correction" ;
  rdfs:comment "Dynamic refocusing which keeps the electron probe focused on the surface of a tilted sample." ;
  rdfs:subClassOf emg:EMG_00000017 .

emg:EMG_00000022 a rdfs:Class ;
  rdfs:label "Electron Diffraction" ;
  rdfs:comment "Diffraction which is based on a propagating electron wave." ;
  rdfs:subClassOf emg:EMG_00000012 .

emg:EMG_00000066 a rdfs:Class ;
  rdfs:label "Detector" ;
  rdfs:comment "A physical part of an electron or ion microscope which is used for signal collection." .

<http://purl.obolibrary.org/obo/IAO_0000115> a rdf:Property ;
  rdfs:label "definition"@en ;
  rdfs:comment "The official definition, explaining the meaning of a class or property. Shall be Aristotelian, formalized and normalized. Can be augmented with colloquial definitions."@en ;
  rdfs:range xsd:string .

<http://purl.obolibrary.org/obo/IAO_0000119> a rdf:Property ;
  rdfs:label "definition source"@en ;
  rdfs:comment "Formal citation, e.g. identifier in external database to indicate / attribute source(s) for the definition. Free text indicate / attribute source(s) for the definition. EXAMPLE: Author Name, URI, MeSH Term C04, PUBMED ID, Wiki uri on 31.01.2007"@en ;
  rdfs:range xsd:string .

<http://purl.obolibrary.org/obo/OMO_0003000> a rdf:Property ;
  rdfs:label "abbreviation" ;
  rdfs:comment "A synonym type for describing abbreviations or initalisms" ;
  rdfs:range xsd:string .

<http://purl.obolibrary.org/obo/OMO_0003012> a rdf:Property ;
  rdfs:label "acronym" ;
  rdfs:comment "A synonym type for describing abbreviations that are a part of the full name's words, such as initialisms or alphabetisms." ;
  rdfs:range xsd:string .